1-1 of 1
Keywords: micro cantilever beams
Follow your search
Access your saved searches in your account

Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Proceedings Papers

Proc. ASME. IDETC-CIE2009, Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies, 597-606, August 30–September 2, 2009
Paper No: DETC2009-86977
... of various geometry and processing parameters on the pull-in characteristics of those micro beams. The method and results presented in this work would be very useful for related micro sensors and actuator designs. Keywords: micro cantilever beams, residual stress gradient, electrostatic load, energy method...