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Keywords: micro cantilever beams
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Proceedings Papers

Proc. ASME. IDETC-CIE2009, Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies, 597-606, August 30–September 2, 2009
Paper No: DETC2009-86977
... of various geometry and processing parameters on the pull-in characteristics of those micro beams. The method and results presented in this work would be very useful for related micro sensors and actuator designs. Keywords: micro cantilever beams, residual stress gradient, electrostatic load, energy method...