We present the first steps towards a device for the parallel detection of multiple biomolecules through the binding-induced deflection of microcantilevers. In this study the thermal bimorph effect is used to model the changes in surface stress that are caused by molecular binding. A bank of five cantilevers (each 600 μm long, 645 nm thick) is actuated thermally over a range of 3 μm of tip deflection. The cantilevers are illuminated with a laser and the resulting pattern of reflected spots is used to validate a new CCD-based detection method that tracks the deflections of multiple cantilevers simultaneously. A stress-balancing fabrication technique was also implemented to reduce the initial deflection by an nearly order of magnitude.

This content is only available via PDF.
You do not currently have access to this content.