This paper presents the design and experimental implementation of an adaptive inverse control system for a two axis MEMS tilting mirror used for optical beam steering. The theoretical issues and practical design considerations involved in this task are discussed in detail. The first topic addressed is the system identification of input-output and state-space models of the MEMS mirror. Consistency among the following two system identification methods is verified: identification of a parameterized transfer function and identification of a state-space model by a subspace method. Next, a stabilizing feedback controller and an adaptive inverse control scheme based on an adaptive inverse QR recursive least-squares filter are developed. Finally, the experimental implementation of the control loops is described and the performance of the beam steering system is analyzed.

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