Heat and mass transfer devices are being fabricated by International Mezzo Technologies that utilize micro features with increasingly aggressive combinations of both feature height and feature aspect ratio. Improvements in x-ray lithography using SU-8 now make it possible to lithographically define densely packed arrays of features with heights of 3 mm and with aspect ratios of around 25. These arrays potentially serve as the starting point for increasingly aggressive LIGA-based micro machining of heat exchangers, regenerators, recuperators, etc. that have superior performance due to length scale advantage.

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