Heat and mass transfer devices are being fabricated by International Mezzo Technologies that utilize micro features with increasingly aggressive combinations of both feature height and feature aspect ratio. Improvements in x-ray lithography using SU-8 now make it possible to lithographically define densely packed arrays of features with heights of 3 mm and with aspect ratios of around 25. These arrays potentially serve as the starting point for increasingly aggressive LIGA-based micro machining of heat exchangers, regenerators, recuperators, etc. that have superior performance due to length scale advantage.
Very Deep X-Ray Lithography for Heat and Mass Transfer Applications
- Views Icon Views
- Share Icon Share
- Search Site
Kelly, KW, Becnell, C, & Desta, Y. "Very Deep X-Ray Lithography for Heat and Mass Transfer Applications." Proceedings of the ASME 2004 International Mechanical Engineering Congress and Exposition. X-Rays in Mechanical Engineering Applications. Anaheim, California, USA. November 13–19, 2004. pp. 35-38. ASME. https://doi.org/10.1115/IMECE2004-62438
Download citation file: