Molecular dynamics simulations and the non-equilibrium direct method are used to predict the effective cross-plane thermal conductivity of Si/Si1−xGex superlattices modeled by the Stillinger-Weber potential. The experimentally observed thermal conductivity design space and the methodology of making the thermal conductivity prediction with the direct method are reviewed. Preliminary results for the thermal conductivity prediction of a Si/Si0.7Ge0.3 at a temperature of 500 K are discussed.

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