The static modeling of a bi-axial torsional micro-mirror with sidewall electrodes is investigated. The mirror and sidewall electrodes experience different voltages. As a result of the potential difference, the mirror rotates about x and y axes with the torques generated from electrostatic forces by the sidewall and bottom electrodes. The rotations about two axes are made possible using a gimbal frame and serpentine springs. An analytical model is presented that is a simplified model of a previous study based on independent excitation of the two rotation angles. The simplified model enables prediction of the rotation angles with good accuracy and faster computation time.
Static Modeling of a Bi-Axial Micro-Mirror With Sidewall Electrodes
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Towfighian, S, & Ozdogan, M. "Static Modeling of a Bi-Axial Micro-Mirror With Sidewall Electrodes." Proceedings of the ASME 2014 International Mechanical Engineering Congress and Exposition. Volume 10: Micro- and Nano-Systems Engineering and Packaging. Montreal, Quebec, Canada. November 14–20, 2014. V010T13A030. ASME. https://doi.org/10.1115/IMECE2014-38834
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