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Keywords: shielded anodeClose
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1217-1222, January 10–13, 2007
Paper No: MNC2007-21094
... with vertical sidewall and micro structures with slanting profile have been produced. Kewords: micro fabrication, electrodeposition, shielded anode, microstructure 1. INTRODUCTION Metal microstructure has more and more applications in MEMS (Micro ElectroMechanical Systems). However, fabrication of metal...