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Keywords: surface roughness
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Proceedings Papers

Effects of Substrate Properties, Film Thickness and Evaporation Rate on the Surface Roughness of Ultra Thin Titanium Films

Guoqiang Han, Zhuangde Jiang, Weixuan Jing, Mingzhi Zhu
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1223-1226, January 10–13, 2007
Paper No: MNC2007-21096
https://doi.org/10.1115/MNC2007-21096
... 11 06 2009 Ultra thin (less than 50nm) titanium films with various thicknesses are systematically deposited on different substrates by electron-beam evaporation at various deposition rates in order to correlate flat titanium film surface roughness with deposition process parameters...
View Paper titled, Effects of Substrate Properties, Film Thickness and Evaporation Rate on the <span class="search-highlight">Surface</span> <span class="search-highlight">Roughness</span> of Ultra Thin Titanium Films
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Topics: Evaporation, Film thickness, Surface roughness, Titanium
Proceedings Papers

Effects of Surface Roughness and Slip Flow on the Performance of a Spiral Groove Gas Face Seal

Xu-Dong Peng, Song-En Sheng, Xiao-Ni Yin, Ji-Yun Li
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1113-1118, January 10–13, 2007
Paper No: MNC2007-21443
https://doi.org/10.1115/MNC2007-21443
... 11 06 2009 Proceedings of MNC2007 MicroNanoChina07 January 10-13, 2007, Sanya, Hainan, China MNC2007-21443is less than 1.0 micron and in the range of 0.5 Kn 1.0, the effects of surface roughness and slip flow diminished on gas film stiffness and frictional work but are still significant...
View Paper titled, Effects of <span class="search-highlight">Surface</span> <span class="search-highlight">Roughness</span> and Slip Flow on the Performance of a Spiral Groove Gas Face Seal
Open the PDF for Effects of <span class="search-highlight">Surface</span> <span class="search-highlight">Roughness</span> and Slip Flow on the Performance of a Spiral Groove Gas Face Seal in another window
Topics: Slip flow, Surface roughness