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Keywords: surface roughness
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Proceedings Papers

Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1223-1226, January 10–13, 2007
Paper No: MNC2007-21096
... 11 06 2009 Ultra thin (less than 50nm) titanium films with various thicknesses are systematically deposited on different substrates by electron-beam evaporation at various deposition rates in order to correlate flat titanium film surface roughness with deposition process parameters...
Proceedings Papers

Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1113-1118, January 10–13, 2007
Paper No: MNC2007-21443
... 11 06 2009 Considering the effects of surface roughness and slip flow, the extended Reynolds equation presented by Makino et al [1] is used to set up the finite element model for a non-contact spiral groove dry gas face seal (S-DGS). The analyses for a typical S-DGS at low speed (≤ 500...