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Keywords: Bimorph Thermal Actuator
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Proceedings Papers

Proc. ASME. MNHMT2009, ASME 2009 Second International Conference on Micro/Nanoscale Heat and Mass Transfer, Volume 2, 373-375, December 18–21, 2009
Paper No: MNHMT2009-18038
... University, Seoul, Korea Joon Sik Lee School of Mechanical and Aerospace Engineering, Seoul National University, Seoul, Korea Key Words : Micromirror, Bimorph Thermal Actuator, Twisting actuation, MEMS Fabrication ABSTRACT A twisting-type micromirror that can be driven by two thermal bimorph actuators...