The present paper examines the large deflections of a clamped circulate thin plate for pressure sensor applications and establishes a simple solution using the singular perturbation technique. The perturbation solution for the slope of the lateral deflection is in a closed form in terms of the load-induced radial stress resultant. The nonlinearity has a strong stiffened effect. The nondimensional load-induced stress resultants are functions of the nondimensional initial stress resultant, lateral load, and Poisson’s ratio.

1.
Cho
,
S. T.
,
Najafi
,
K.
, and
Wise
,
K. D.
,
1992
, “
Internal Stress Compensation and Scaling in Ultra-Sensitive Silicon Pressure Sensors
,”
IEEE Trans. Electron Devices
,
99
(
4
), pp.
836
842
.
2.
Sheplak
,
M.
, and
Dugundji
,
J.
,
1998
, “
Large Deflections of Clamped Circular Plates Under Initial Tension and Transitions to Membrane Behavior
,”
ASME J. Appl. Mech.
,
65
, pp.
107
115
.
3.
Fung, Y. C., and Tong, P., 2001, Classical and Computational Solid Mechanics, World Scientific, Singapore.
4.
O’Malley, R. E., 1991, Singular Perturbation Methods for Ordinary Differential Equations, Spring-Verlag, New York.
You do not currently have access to this content.