The objective of this paper is to formulate the equations of motion and to analyze the vibrations of an atomic force microscope (AFM), which contains a piezoelectric rod coupling with a cantilever beam, and the tip mass interacting with samples. The governing equations of the AFM system are formulated completely by Hamilton’s principle. The piezoelectric rod is treated as an actuator to excite the cantilever beam via an external voltage. The repulsive forces between the tip and samples are modeled by the Hertzian, the Derjaguin-Müller-Toporov, and Johnson-Kendall-Roberts models in the contact region. Finally, numerical results are provided to illustrate the coupling effects between the piezoelectric actuator and the cantilever beam and the interaction effects between the tip and samples on the dynamic responses.
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e-mail: rffung@ccms.nkfust.edu.tw
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December 2005
Technical Briefs
Dynamic Responses of an Atomic Force Microscope Interacting with Samples
Jih-Lian Ha,
Jih-Lian Ha
Associate Professor
Department of Mechanical Engineering,
Far East College
, 49 Chung-Hua Road, Shin-Shi, Tainan, Taiwan 744, ROC
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Rong-Fong Fung,
Rong-Fong Fung
Professor
Department of Mechanical and Automation Engineering,
e-mail: rffung@ccms.nkfust.edu.tw
National Kaohsiung First University of Science and Technology
, 1 University Road, Yenchau, Kaohsiung, Taiwan 824, ROC
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Yi-Chan Chen
Yi-Chan Chen
Graduate Student
Department of Mechanical and Automation Engineering,
National Kaohsiung First University of Science and Technology
, 1 University Road, Yenchau, Kaohsiung, Taiwan 824, ROC
Search for other works by this author on:
Jih-Lian Ha
Associate Professor
Department of Mechanical Engineering,
Far East College
, 49 Chung-Hua Road, Shin-Shi, Tainan, Taiwan 744, ROC
Rong-Fong Fung
Professor
Department of Mechanical and Automation Engineering,
National Kaohsiung First University of Science and Technology
, 1 University Road, Yenchau, Kaohsiung, Taiwan 824, ROCe-mail: rffung@ccms.nkfust.edu.tw
Yi-Chan Chen
Graduate Student
Department of Mechanical and Automation Engineering,
National Kaohsiung First University of Science and Technology
, 1 University Road, Yenchau, Kaohsiung, Taiwan 824, ROCJ. Dyn. Sys., Meas., Control. Dec 2005, 127(4): 705-709 (5 pages)
Published Online: October 17, 2004
Article history
Received:
June 13, 2003
Revised:
October 17, 2004
Citation
Ha, J., Fung, R., and Chen, Y. (October 17, 2004). "Dynamic Responses of an Atomic Force Microscope Interacting with Samples." ASME. J. Dyn. Sys., Meas., Control. December 2005; 127(4): 705–709. https://doi.org/10.1115/1.2101851
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