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Keywords: micromachining
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Journal Articles
Article Type: Technical Papers
J. Fluids Eng. October 2007, 129(10): 1339–1345.
Published Online: May 22, 2007
... by experimental results. The pump is fabricated from silicon and glass substrates using standard MEMS fabrication techniques including deep reactive ion etching, trichlorosilane molecular vapor deposition, and metal-assisted chemical etching for porous silicon fabrication. Micromachined pressure sensors based...
Journal Articles
Article Type: Special Section On The Fluid Mechanics And Rheology Of Nonlinear Materials At The Macro, Micro And Nano Scale
J. Fluids Eng. January 2006, 128(1): 14–19.
Published Online: April 21, 2005
... dielectrophoresis along the flow streamlines and a field-induced phase-separation, the device utilizes “dielectrophoretic gating”to separate analytes suspended in a flowing fluid based on their intrinsic polarizability properties. The gates are integrated into batch fabricated self-sealed surface-micromachined...
Journal Articles
Article Type: Technical Papers
J. Fluids Eng. March 2003, 125(2): 339–344.
Published Online: March 27, 2003
...Mohammad I. Kilani; Paul C. Galambos; Yousef S. Haik; Ching-Jen Chen A new viscous spiral micropump which uses the surface micromachining technology is introduced. The paper outlines the design of a spiral pump fabricated in five levels of polysilicon using Sandia’s Ultraplanar Multilevel MEMS...
Journal Articles
Article Type: Technical Papers
J. Fluids Eng. December 2001, 123(4): 899–908.
Published Online: May 20, 2001
... range. 02 June 2000 20 May 2001 filters micromachining design engineering power consumption 1 = upstream 2 = downstream Current affiliation: Nanogen, Inc., 10398 Pacific Center Court, San Diego, CA 92121. E-mail: jyang@nanogen.com...
Journal Articles
Article Type: Technical Papers
J. Fluids Eng. September 2001, 123(3): 672–679.
Published Online: April 18, 2001
...Gwo-Bin Lee, Assistant Professor; Chen-I Hung, Professor; Bin-Jo Ke, Graduate Student; Guan-Ruey Huang, Graduate Student; Bao-Herng Hwei, Senior Students; Hui-Fang Lai, Senior Students This paper describes hydrodynamic focusing inside a micromachined flow cytometer. Flow cytometry is a process...