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Keywords: elemental semiconductors
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Eng. Gas Turbines Power. July 2003, 125(3): 709–719.
Published Online: August 15, 2003
.... Associate Editor: E. Benvenuti. 03 June 2002 01 December 2001 01 March 2002 15 08 2003 gas turbines combustion micromachining etching micromechanical devices reaction kinetics silicon elemental semiconductors Recent advances in silicon microfabrication...
