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Keywords: etching
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Eng. Gas Turbines Power. July 2003, 125(3): 709–719.
Published Online: August 15, 2003
... radial inflow combustor designs were examined; a single-zone arrangement and a primary and dilution-zone configuration. Both combustors were micromachined from silicon using deep reactive ion etching (DRIE) and aligned fusion wafer bonding. Hydrogen-air and hydrocarbon-air combustion were stabilized...