We demonstrate the functionality of a new active thermal microchip dedicated to the temperature calibration of scanning thermal microscopy (SThM) probes. The silicon micromachined device consists in a suspended thin dielectric membrane in which a heating resistor with a circular area of 50 μm in diameter was embedded. A circular calibration target of 10 μm in diameter was patterned at the center and on top of the membrane on which the SThM probe can land. This target is a resistive temperature detector (RTD) that measures the surface temperature of the sample at the level of the contact area. This allows evaluating the ability of any SThM probe to measure a surface temperature in ambient air conditions. Furthermore, by looking at the thermal balance of the device, the heat dissipated through the probe and the different thermal resistances involved at the contact can be estimated. A comparison of the results obtained for two different SThM probes, microthermocouples and probes with a fluorescent particle is presented to validate the functionality of the micromachined device. Based on experiments and simulations, an analysis of the behavior of probes allows pointing out their performances and limits depending on the sample characteristics whose role is always preponderant. Finally, we also show that a smaller area of the temperature sensor would be required to assess the local disturbance at the contact point.
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Calibration Tools for Scanning Thermal Microscopy Probes Used in Temperature Measurement Mode
T. P. Nguyen,
T. P. Nguyen
FEMTO-ST Institute,
UMR 6174,
Université de Franche-Comté,
CNRS, ENSMM, UTBM,
Besançon 25030, France
UMR 6174,
Université de Franche-Comté,
CNRS, ENSMM, UTBM,
Besançon 25030, France
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L. Thiery,
L. Thiery
FEMTO-ST Institute,
UMR 6174,
Université de Franche-Comté,
CNRS, ENSMM, UTBM,
Besançon 25030, France
e-mail: laurent.thiery@univ-fcomte.fr
UMR 6174,
Université de Franche-Comté,
CNRS, ENSMM, UTBM,
Besançon 25030, France
e-mail: laurent.thiery@univ-fcomte.fr
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S. Euphrasie,
S. Euphrasie
FEMTO-ST Institute,
UMR 6174,
Université de Franche-Comté,
CNRS, ENSMM, UTBM,
Besançon 25030, France
UMR 6174,
Université de Franche-Comté,
CNRS, ENSMM, UTBM,
Besançon 25030, France
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E. Lemaire,
E. Lemaire
Ecole Polytechnique Fédérale de Lausanne,
Soft Transducers Laboratory,
Neuchâtel CH-2002, Switzerland
Soft Transducers Laboratory,
Neuchâtel CH-2002, Switzerland
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S. Khan,
S. Khan
Ecole Polytechnique Fédérale de Lausanne,
Soft Transducers Laboratory,
Neuchâtel CH-2002, Switzerland
Soft Transducers Laboratory,
Neuchâtel CH-2002, Switzerland
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D. Briand,
D. Briand
Ecole Polytechnique Fédérale de Lausanne,
Soft Transducers Laboratory,
Neuchâtel CH-2002, Switzerland
Soft Transducers Laboratory,
Neuchâtel CH-2002, Switzerland
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L. Aigouy,
L. Aigouy
LPEM, ESPCI Paris,
Paris 75005, France;
Paris 75005, France;
CNRS, PSL Research University,
Sorbonne Universités,
Paris 75006, France
Sorbonne Universités,
Paris 75006, France
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S. Gomes,
S. Gomes
CETHIL,
UMR5008,
Univ Lyon
UMR5008,
Univ Lyon
CNRS,
INSA-Lyon,
Université Claude Bernard Lyon 1,
Villeurbanne 69621, France
INSA-Lyon,
Université Claude Bernard Lyon 1,
Villeurbanne 69621, France
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P. Vairac
P. Vairac
FEMTO-ST Institute,
UMR 6174,
Université de Franche-Comté,
CNRS, ENSMM, UTBM,
Besançon 25030, France
UMR 6174,
Université de Franche-Comté,
CNRS, ENSMM, UTBM,
Besançon 25030, France
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T. P. Nguyen
FEMTO-ST Institute,
UMR 6174,
Université de Franche-Comté,
CNRS, ENSMM, UTBM,
Besançon 25030, France
UMR 6174,
Université de Franche-Comté,
CNRS, ENSMM, UTBM,
Besançon 25030, France
L. Thiery
FEMTO-ST Institute,
UMR 6174,
Université de Franche-Comté,
CNRS, ENSMM, UTBM,
Besançon 25030, France
e-mail: laurent.thiery@univ-fcomte.fr
UMR 6174,
Université de Franche-Comté,
CNRS, ENSMM, UTBM,
Besançon 25030, France
e-mail: laurent.thiery@univ-fcomte.fr
S. Euphrasie
FEMTO-ST Institute,
UMR 6174,
Université de Franche-Comté,
CNRS, ENSMM, UTBM,
Besançon 25030, France
UMR 6174,
Université de Franche-Comté,
CNRS, ENSMM, UTBM,
Besançon 25030, France
E. Lemaire
Ecole Polytechnique Fédérale de Lausanne,
Soft Transducers Laboratory,
Neuchâtel CH-2002, Switzerland
Soft Transducers Laboratory,
Neuchâtel CH-2002, Switzerland
S. Khan
Ecole Polytechnique Fédérale de Lausanne,
Soft Transducers Laboratory,
Neuchâtel CH-2002, Switzerland
Soft Transducers Laboratory,
Neuchâtel CH-2002, Switzerland
D. Briand
Ecole Polytechnique Fédérale de Lausanne,
Soft Transducers Laboratory,
Neuchâtel CH-2002, Switzerland
Soft Transducers Laboratory,
Neuchâtel CH-2002, Switzerland
L. Aigouy
LPEM, ESPCI Paris,
Paris 75005, France;
Paris 75005, France;
CNRS, PSL Research University,
Sorbonne Universités,
Paris 75006, France
Sorbonne Universités,
Paris 75006, France
S. Gomes
CETHIL,
UMR5008,
Univ Lyon
UMR5008,
Univ Lyon
CNRS,
INSA-Lyon,
Université Claude Bernard Lyon 1,
Villeurbanne 69621, France
INSA-Lyon,
Université Claude Bernard Lyon 1,
Villeurbanne 69621, France
P. Vairac
FEMTO-ST Institute,
UMR 6174,
Université de Franche-Comté,
CNRS, ENSMM, UTBM,
Besançon 25030, France
UMR 6174,
Université de Franche-Comté,
CNRS, ENSMM, UTBM,
Besançon 25030, France
Contributed by the Heat Transfer Division of ASME for publication in the JOURNAL OF HEAT TRANSFER. Manuscript received October 11, 2018; final manuscript received March 26, 2019; published online May 14, 2019. Assoc. Editor: Srinath V. Ekkad.
J. Heat Transfer. Jul 2019, 141(7): 071601 (9 pages)
Published Online: May 14, 2019
Article history
Received:
October 11, 2018
Revised:
March 26, 2019
Citation
Nguyen, T. P., Thiery, L., Euphrasie, S., Lemaire, E., Khan, S., Briand, D., Aigouy, L., Gomes, S., and Vairac, P. (May 14, 2019). "Calibration Tools for Scanning Thermal Microscopy Probes Used in Temperature Measurement Mode." ASME. J. Heat Transfer. July 2019; 141(7): 071601. https://doi.org/10.1115/1.4043381
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