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Journal Articles

Numerical Simulation of Excimer Laser Cleaning of Film and Particle Contaminants

S. Marimuthu, A. Mhich, I. S. Molchan, D. Whitehead, Z. B. Wang, P. Mativenga, L. Li, Z. Liu, C. Grafton-Reed, S. Cheetham, S. Dilworth
Journal: ASME Journal of Heat and Mass Transfer
Publisher: ASME
Article Type: Research-Article
J. Heat Mass Transfer. December 2013, 135(12): 121301.
Paper No: HT-12-1254
https://doi.org/10.1115/1.4024836
Published Online: September 27, 2013
View Article titled, Numerical Simulation of Excimer Laser Cleaning of Film and Particle Contaminants
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Topics: Excimer lasers, Lasers, Particulate matter, Temperature, Computer simulation
Journal Articles

Heat Transfer and Phase Transformations in Laser Annealing of Thin Si Films

Seung-Jae Moon, Minghong Lee, Costas P. Grigoropoulos
Journal: ASME Journal of Heat and Mass Transfer
Publisher: ASME
Article Type: Review Papers
J. Heat Mass Transfer. April 2002, 124(2): 253–264.
https://doi.org/10.1115/1.1447941
Published Online: November 5, 2001
View Article titled, Heat Transfer and Phase Transformations in Laser Annealing of Thin Si Films
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Topics: Crystallization, Lasers, Nucleation (Physics), Temperature, Melting, Silicon, Excimer lasers, Thin films, Phase transitions, Recrystallization
Journal Articles

Transient Temperature During the Vaporization of Liquid on a Pulsed Laser-Heated Solid Surface

H. K. Park, X. Zhang, C. P. Grigoropoulos, C. C. Poon, A. C. Tam
Journal: ASME Journal of Heat and Mass Transfer
Publisher: ASME
Article Type: Research Papers
J. Heat Mass Transfer. August 1996, 118(3): 702–708.
https://doi.org/10.1115/1.2822689
Published Online: August 1, 1996
View Article titled, Transient Temperature During the Vaporization of Liquid on a Pulsed Laser-Heated Solid Surface
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Topics: Lasers, Temperature, Transients (Dynamics), Reflectance, Thin films, Boiling, Bubbles, Collapse, Dynamics (Mechanics), Excimer lasers
Journal Articles

Heat Transfer in Excimer Laser Melting of Thin Polysilicon Layers

X. Xu, C. P. Grigoropoulos, R. E. Russo
Journal: ASME Journal of Heat and Mass Transfer
Publisher: ASME
Article Type: Research Papers
J. Heat Mass Transfer. August 1995, 117(3): 708–715.
https://doi.org/10.1115/1.2822634
Published Online: August 1, 1995
View Article titled, Heat Transfer in Excimer Laser Melting of Thin Polysilicon Layers
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Topics: Excimer lasers, Heat transfer, Melting, Polysilicon, Temperature, Solidification, Equilibrium (Physics), Lasers, Manufacturing, Materials processing
Journal Articles

Transient Temperature During Pulsed Excimer Laser Heating of Thin Polysilicon Films Obtained by Optical Reflectivity Measurement

X. Xu, C. P. Grigoropoulos, R. E. Russo
Journal: ASME Journal of Heat and Mass Transfer
Publisher: ASME
Article Type: Research Papers
J. Heat Mass Transfer. February 1995, 117(1): 17–24.
https://doi.org/10.1115/1.2822301
Published Online: February 1, 1995
View Article titled, Transient Temperature During Pulsed Excimer Laser Heating of Thin Polysilicon Films Obtained by Optical Reflectivity Measurement
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Topics: Excimer lasers, Heating, Lasers, Polysilicon, Reflectance, Temperature, Transients (Dynamics), Chemical vapor deposition, Heat transfer, Manufacturing
Journal Articles

Transient Optical Transmission Measurement in Excimer-Laser Irradiation of Amorphous Silicon Films

H. K. Park, X. Xu, C. P. Grigoropoulos, N. Do, L. Klees, P. T. Leung, A. C. Tam
Journal: ASME Journal of Heat and Mass Transfer
Publisher: ASME
Article Type: Research Papers
J. Heat Mass Transfer. February 1993, 115(1): 178–183.
https://doi.org/10.1115/1.2910645
Published Online: February 1, 1993
View Article titled, Transient Optical Transmission Measurement in Excimer-Laser Irradiation of Amorphous Silicon Films
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Topics: Excimer lasers, Irradiation (Radiation exposure), Lasers, Silicon, Transients (Dynamics), Temperature, Thin films, Film thickness, Heat transfer, Heating