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Keywords: chemical vapor deposition
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Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Heat Mass Transfer. October 2021, 143(10): 102201.
Paper No: HT-21-1107
Published Online: September 8, 2021
...Omar Dhannoon Jumaah; Yogesh Jaluria Chemical vapor deposition (CVD) is a widely used manufacturing process for obtaining thin films of materials like silicon, silicon carbide, graphene, and gallium nitride that are employed in the fabrication of electronic and optical devices. Gallium nitride (GaN...
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Heat Mass Transfer. August 2011, 133(8): 082501.
Published Online: May 4, 2011
...Nasir Memon; Yogesh Jaluria An experimental study is undertaken to investigate the flow structure and heat transfer in a stagnation flow chemical vapor deposition (CVD) reactor at atmospheric pressure. It is critical to develop models that predict flow patterns in such a reactor to achieve uniform...
Journal Articles
Journal Articles
Publisher: ASME
Article Type: Photo Gallery
J. Heat Mass Transfer. August 2003, 125(4): 546.
Published Online: August 1, 2003
...C. Trinkle; P. Kichambare; R. R. Vallance; B. Sadanadan; A. M. Rao; B. Wong; M. P. Menegu¨c; A. Bah; K. Javed carbon nanotubes heat transfer field emission chemical vapor deposition micromachining electron beams 546 Õ Vol. 125, AUGUST 2003 Transactions of the ASME 2003 ASME ...