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Keywords: etching
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Journal Articles
Article Type: Research Papers
J. Heat Transfer. December 2011, 133(12): 121701.
Published Online: October 6, 2011
... diameters 218 and 303 μm are fabricated by wet etching process on silicon wafer. An experimental set-up having provision of flow in the channel and temperature measurement along with bottom wall temperature is built-up. Alumina nanofluids with concentrations of 0.25 vol. %, 0.5 vol. %, and 1 vol. % with 45...
Journal Articles
Article Type: Research Papers
J. Heat Transfer. April 2007, 129(4): 509–516.
Published Online: October 21, 2006
...P. Rath; J. C. Chai; Y. C. Lam; V. M. Murukeshan; H. Zheng A total concentration fixed-grid method is presented in this paper to model the two-dimensional wet chemical etching. Two limiting cases are discussed, namely—the diffusion-controlled etching and the reaction-controlled etching. A total...
Journal Articles
Article Type: Technical Papers
J. Heat Transfer. October 2004, 126(5): 753–763.
Published Online: November 16, 2004
... on the friction factor. The microchannels were etched into silicon wafers, capped with glass, and have hydraulic diameters between 5 and 96 μm. The pressure was measured at seven locations along the channel length to determine local values of Knudsen number, Mach number and friction factor. All measurements were...