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Keywords: lithography
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Journal Articles
Article Type: Research Papers
J. Heat Transfer. May 2009, 131(5): 051401.
Published Online: March 20, 2009
.... The microchannel coolers are made by lithography and deep reactive ion etching of single crystal silicon. The test dies contain a dc-operated resistive zone that approximates the spatially averaged heat flux that would appear in low-temperature cofired ceramic microwave circuit packages and in monolithic microwave...
Journal Articles
Article Type: Technical Papers
J. Heat Transfer. June 2004, 126(3): 453–462.
Published Online: June 16, 2004
... evaporation heat pipes LIGA cooling channel flow micromechanical devices gravity lithography electrodeposition Channel Flow Evaporation Heat Transfer Heat Pipes Microscale Evaporative cooling devices such as heat pipes and capillary pumped loops utilize capillary suction to draw...