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Journal: Journal of Heat Transfer
Article Type: Technology Review
J. Heat Transfer. November 2006, 128(11): 1221–1233.
Published Online: March 30, 2006
... and fluid flow in microheat sinks, micropumps, microturbines, microengines, micromixers, as well as microsensors. Recent experimental techniques in the thermal microelectromechanical systems (MEMS) field have also been presented. Although some thermal MEMS devices have penetrated the commercial market...