A parametric study on shape and cross-sectional area of the thin film produced by Laser Chemical Vapor Deposition (LCVD) with a moving laser beam is presented. The problem is formulated in the coordinate system that moves with the laser beam, and, therefore, the problem is a quasi-steady state. The effects of laser scanning velocity, laser power, and radius of the laser beam on the shapes of the deposited film are investigated. A simulation-based correlation of the cross-sectional area is proposed based on the simulation results.
A Simulation-based Correlation of Cross-Sectional Area of the Thin Film Produced by Laser Chemical Vapor Deposition With a Moving Laser Beam
Contributed by the Manufacturing Engineering Division for publication in the JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING. Manuscript received October 7, 2003; revised August 2, 2004. Associate Editor: K. Rajurkar.
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Zhang, Y. (February 4, 2005). "A Simulation-based Correlation of Cross-Sectional Area of the Thin Film Produced by Laser Chemical Vapor Deposition With a Moving Laser Beam ." ASME. J. Manuf. Sci. Eng. November 2004; 126(4): 796–800. https://doi.org/10.1115/1.1813478
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