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Keywords: diffractometry
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2024, 146(7): 070905.
Paper No: MANU-24-1019
Published Online: April 29, 2024
...Kuan Lu; ChaBum Lee This article introduces a novel hole edge inspection and metrology technology by edge diffractometry, which occurs when light interacts with the hole edge. The proposed method allows for simultaneous characterization of hole part error and edge roughness conditions. Edge...