...Christian D. Damsgaard; Dennis Mortensen; Pirmin Rombach; Ole Hansen This paper presents a simple procedure for simultaneous cutting and forming of thin Al foils for use in MEMS components. The procedure makes use of scaled down macroscopic sheet forming and cutting techniques by using a hydraulic...

..., and the driving mechanism of methods for realizing burr-free blanking of foil were realized. The conditions for realizing successful burr-free blanking are the clearance of step 1 and punch penetration depth. Use of the piezoelectric actuator element and the design method for this was proposed as the punch drive...

...Toshihiko Mori An integrated micropress was developed for ultrafine piercing of metallic foils by a SiC fiber punch. The fiber punch was produced by a series of processes that use buffing and electrolysis operations. The technology incorporates unique tooling and fixturing techniques to handle...