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1-4 of 4
Keywords: photolithography
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Journal Articles
Publisher: ASME
Article Type: Special Issue On Nanomanufacturing
J. Manuf. Sci. Eng. June 2010, 132(3): 030911.
Published Online: June 3, 2010
... plays a key role in these two competing processes. 18 01 2010 20 04 2010 03 06 2010 03 06 2010 coating techniques electromigration nanofabrication photolithography rapid prototyping (industrial) nanomanufacturing break junctions focused ion beam milling...
Journal Articles
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. June 2008, 130(3): 034501.
Published Online: May 2, 2008
... of a sintered alumina tool insert using a physical vapor deposition and photolithography technique. An empirical formula that shows Seebeck coefficient of a TFT depends on electrical resistance of the TFT circuit was established. Three different types of tools in number and size of TFTs were developed...
Journal Articles
Noritaka Kawasegi, Noboru Takano, Daisuke Oka, Noboru Morita, Shigeru Yamada, Kazutaka Kanda, Shigeto Takano, Tsutomu Obata, Kiwamu Ashida
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2006, 128(3): 723–729.
Published Online: November 23, 2005
... of silicon, a nanomachining cantilever with a pyramidal diamond tip was developed using a combination of photolithography and hot-filament chemical vapor deposition. Nanomachining experiments on silicon using the cantilever are demonstrated under various machining parameters. The silicon surface can...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2003, 125(3): 564–576.
Published Online: July 23, 2003
... in the JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING . Manuscript received July 2001; revised Nov. 2002. Associate Editor: Y. Lawrence Yao. 01 July 2001 01 Nov 2002 23 07 2003 glass fibre reinforced plastics photolithography coating techniques The laser-beam...
