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Keywords: sputter etching
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Sol. Energy Eng. February 2005, 127(1): 146–149.
Published Online: February 7, 2005
... of plasma damage has been achieved while keeping front reflectance to low levels. Internal quantum efficiencies higher than those on planar and wet-textured cells have been obtained, boosting cell currents and efficiencies by up to 6% on tricrystalline Si cells. solar cells surface texture sputter...