The technique of High-Resolution Modeling of Thin Films is combined with a two-scale analysis to formulate the Compressible Narrow Groove Analysis. The data bank of Fukui and Kaneko (1990) is emulated in the form of an empirical formula to treat the state of arbitrary rarefaction of the gas film. Due to its transcendental character, the compressible fine-scale solution is treated on the fly as a part of the global-scale computation. Derivations for the Compressible Narrow Groove Analysis are presented here. In a companion paper (Pan, 1998), the Compressible Narrow Groove Analysis is used to compute the pressure field of a spherical device operating in both the pressurizing and evacuating modes.

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