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Keywords: lattice Boltzmann method
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Journal Articles
Journal:
Journal of Tribology
Publisher: ASME
Article Type: Other (Seals, Manufacturing)
J. Tribol. January 2012, 134(1): 012201.
Published Online: February 9, 2012
... rough surface such as the slurry flow in CMP, a new strategy is developed to research the incompressible laminar flow through a narrow gap between various nonconventional rough surfaces by combining the lattice Boltzmann method (LBM) and numerical simulation of random rough surface. With this strategy...
