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Keywords: lubricant flow
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Journal Articles
Publisher: ASME
Article Type: Other (Seals, Manufacturing)
J. Tribol. January 2012, 134(1): 012201.
Published Online: February 9, 2012
... and verified through a comparison with the results obtained using the presented numerical simulation strategy. 04 06 2011 30 11 2011 08 02 2012 09 02 2012 lubricant flow rough surface chemical mechanical planarization lattice Boltzmann method Surface roughness, which...