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Keywords: micromechanics
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Journal Articles
Journal:
Journal of Turbomachinery
Publisher: ASME
Article Type: Technical Papers
J. Turbomach. July 2000, 122(3): 505–516.
Published Online: February 1, 1999
..., the following topics are addressed: • Probe technology : Miniature probes with tip diameter ranging from 0.84 to 1.80 mm (one-sensor and three-sensor probes, respectively) have been developed. New technologies derived from microelectronics and micromechanics have been used to achieve an adequate packaging...
