This paper presents a bulk micromachining process to fabricate micro-constrained layer treatments (MCLT) on a microstructure to increase its damping, and demonstrates the damping improvement through calibrated experiments. MCLT consists of a silicon base structure (e.g., beams or plates), a viscoelastic photoresist layer, and an aluminum constraining layer. Silicon base beams and plates are fabricated from {100} wafer through Ethylene-Diamine-Pyrocatechol etch and buffered oxide etch. A 4.5-μm thick photoresist AZ4620 is spun on the silicon base beam as the viscoelastic layer. Finally, an aluminum layer is deposited through low-pressure vapor deposition as the constraining layer. To evaluate damping performance of MCLT, silicon beams with and without MCLT are subjected to swept-sine excitations by PZT from 0 to 100 kHz. In addition, a laser Doppler vibrometer and a spectrum analyzer measured frequency response functions (FRF) of the specimen. A finite element analysis identifies the resonance modes measured in FRF. Experimental results confirm that MCLT can increase damping of silicon beams by at least 40%. Significantly better damping performance is expected, if the loss factor of the viscoelastic layer is increased.
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October 2002
Technical Papers
Constrained Layer Damping Treatments for Microstructures
Yi-Chu Hsu, Graduate Student,
Yi-Chu Hsu, Graduate Student
Department of Mechanical Engineering, University of Washington, Seattle, WA 98195-2600
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I. Y. Shen, Associate Professor
I. Y. Shen, Associate Professor
Department of Mechanical Engineering, University of Washington, Seattle, WA 98195-2600
Search for other works by this author on:
Yi-Chu Hsu, Graduate Student
Department of Mechanical Engineering, University of Washington, Seattle, WA 98195-2600
I. Y. Shen, Associate Professor
Department of Mechanical Engineering, University of Washington, Seattle, WA 98195-2600
Contributed by the Technical Committee on Vibration and Sound for publication in the JOURNAL OF VIBRATION AND ACOUSTICS. Manuscript received March 2001; Revised April 2002. Associate Editor: H. S. Tzou.
J. Vib. Acoust. Oct 2002, 124(4): 612-616 (5 pages)
Published Online: September 20, 2002
Article history
Received:
March 1, 2001
Revised:
April 1, 2002
Online:
September 20, 2002
Citation
Hsu, Y., and Shen, I. Y. (September 20, 2002). "Constrained Layer Damping Treatments for Microstructures ." ASME. J. Vib. Acoust. October 2002; 124(4): 612–616. https://doi.org/10.1115/1.1500743
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