Microelectromechanical system (MEMS) based arrays have been employed to increase the bandwidth and sensitivity of many sensors and actuators. In this paper, we present an approximate model to demonstrate the tuning of in-plane and out-of-plane frequencies of MEMS arrays consisting of fixed–fixed beams. Subsequently, we apply the Galerkin's method with single approximate mode to obtain the reduced-order static and dynamic equations. Corresponding to a given direct current (DC) voltage, we first solve the static equations and then obtain corresponding frequencies from the dynamic equation for single beam and arrays of multibeams. We compare the model with available experimental results. Later, we show the influence of different frequency tuning parameters such as the initial tensions, fringing field coefficients and the variable inter beam gaps between the microbeam and electrodes to control the coupling region and different modal frequencies of the beam. Finally, we obtain a compact model which can be used in optimizing the bandwidth and sensitivity of microbeams array.
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April 2016
Research-Article
Frequency Analysis of Linearly Coupled Modes of MEMS Arrays
Prashant N. Kambali,
Prashant N. Kambali
Department of Mechanical and
Aerospace Engineering,
Indian Institute of Technology Hyderabad,
Sangareddy, Medak 502285, India
Aerospace Engineering,
Indian Institute of Technology Hyderabad,
Sangareddy, Medak 502285, India
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Gyanadutta Swain,
Gyanadutta Swain
Department of Mechanical and
Aerospace Engineering,
Indian Institute of Technology Hyderabad,
Sangareddy, Medak 502285, India
Aerospace Engineering,
Indian Institute of Technology Hyderabad,
Sangareddy, Medak 502285, India
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Ashok Kumar Pandey
Ashok Kumar Pandey
Department of Mechanical and
Aerospace Engineering,
Indian Institute of Technology Hyderabad,
Sangareddy, Medak 502285, India
e-mail: ashok@iith.ac.in
Aerospace Engineering,
Indian Institute of Technology Hyderabad,
Sangareddy, Medak 502285, India
e-mail: ashok@iith.ac.in
Search for other works by this author on:
Prashant N. Kambali
Department of Mechanical and
Aerospace Engineering,
Indian Institute of Technology Hyderabad,
Sangareddy, Medak 502285, India
Aerospace Engineering,
Indian Institute of Technology Hyderabad,
Sangareddy, Medak 502285, India
Gyanadutta Swain
Department of Mechanical and
Aerospace Engineering,
Indian Institute of Technology Hyderabad,
Sangareddy, Medak 502285, India
Aerospace Engineering,
Indian Institute of Technology Hyderabad,
Sangareddy, Medak 502285, India
Ashok Kumar Pandey
Department of Mechanical and
Aerospace Engineering,
Indian Institute of Technology Hyderabad,
Sangareddy, Medak 502285, India
e-mail: ashok@iith.ac.in
Aerospace Engineering,
Indian Institute of Technology Hyderabad,
Sangareddy, Medak 502285, India
e-mail: ashok@iith.ac.in
1Corresponding author.
Contributed by the Technical Committee on Vibration and Sound of ASME for publication in the JOURNAL OF VIBRATION AND ACOUSTICS. Manuscript received September 14, 2015; final manuscript received January 5, 2016; published online February 5, 2016. Assoc. Editor: Jeffrey F. Rhoads.
J. Vib. Acoust. Apr 2016, 138(2): 021017 (9 pages)
Published Online: February 5, 2016
Article history
Received:
September 14, 2015
Revised:
January 5, 2016
Citation
Kambali, P. N., Swain, G., and Kumar Pandey, A. (February 5, 2016). "Frequency Analysis of Linearly Coupled Modes of MEMS Arrays." ASME. J. Vib. Acoust. April 2016; 138(2): 021017. https://doi.org/10.1115/1.4032517
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