(a) An integrated MEMS testing stage for mechanical testing of single NWs (from Ref. [49]). The stage includes a thermal actuator and a capacitive load sensor with a gap in between, across which the NW sample is mounted. (b) An MEMS stage for fatigue testing. (Reprinted with permission from Hosseinian and Pierron [124]. Copyright 2013 by Royal Society of Chemistry.) Compared to the one in (a), one more capacitive sensor is included to measure sample displacement digitally. (c) An MEMS stage including an on-chip heater based on Joule heating (the boxed region in the center). (Reprinted with permission from Chang and Zhu [54]. Copyright 2013 by American Institute of Physics.) This stage features a symmetric actuator and load sensor design to ensure the same temperature at both ends of the sample.